• 
  Siewert, F.: Optical metrology - on the inspection of ultra-precise FEL-optics. In: Federico Canova ; Luca Poletto [Eds.] : Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent SourcesHeidelberg: Springer, 2015 (Springer series in optical sciences ; 197). - ISBN 978-3-662-47442-6, p. 137-149

10.1007/978-3-662-47443-3_7
Open Access Version (available 01.01.2030)