Öffnet in neuem Fenster Opens in a new window Öffnet externe Seite Opens an external site Öffnet externe Seite in neuem Fenster Opens an external site in a new window

Institute for Electronic Structure Dynamics

MetrokX

Application laboratory for metrology with coherent X-rays

The Project is running from July 1st, 2024.

The importance of light in the spectral range from extreme ultraviolet (EUV) to soft X-rays (SXR) is currently increasing rapidly for high-tech industries such as semiconductor manufacturing, biomedical imaging, and optical analytics. 

These industries have a global annual market value of more than €20 billion and a projected annual growth rate of 5–12%, and are of great importance to Berlin's economic These industries have a global annual market value of more than €20 billion and a projected annual growth rate of 5–12% and are of great importance to the Berlin economic region. This relevance is also reflected in the joint Berlin-Brandenburg innovation strategy InnoBB 2025, which dedicates one of its four clusters to the field of optics and photonics.

The provision of coherent EUV/SXR light sources with the highest brilliance is therefore a key component for strengthening Berlin-based companies active in these industries. The provision of coherent EUV/SXR light sources with maximum brilliance is therefore a key component in strengthening Berlin-based companies operating in these industries. For the development and use of these light sources, novel optics, detectors, and diagnostic devices must also be developed in order to maintain coherence during the transport of the radiation and to enable intensity, wavefront, and coherence measurements with spectral and 
spatial resolution.

The aim of this project is to establish a world-leading application laboratory for metrology with coherent X-rays (MetrokX) at the Helmholtz-Zentrum Berlin (HZB). This laboratory will enable the development and optimization of coherent EUV/SXR sources, optics, and diagnostic equipment. The main target groups of this project are manufacturers of re This station builds on existing HZB facilities and expertise and will be developed in six work packages over a period of 30 months by nine HZB scientists with extensive experience in the development and application of coherent light sources and diagnostic devices, and one ERDF-funded, project-related postdoc. 

With the establishment of the proposed unique and externally accessible coherent EUV/SXR source and diagnostics suite, MetrokX will support the innovations of the companies in the optics and photonics cluster of InnoBB 2025, thereby strengthening Berlin's position as a leading center for optics and photonics.