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  Klaus, M. ; Reimers, W. ; Genzel, Ch.: Application of energy-dispersive diffraction to the analysis of highly Inhomogeneous residual stress fields in thin film structures. Powder Diffraction 24 [Suppl.1] (2009), p. S82-S86

10.1154/1.3134362

Abstract:
For residual stress evaluation in complex substrate-coating-systems, energy-dispersive (ED) diffraction with energies up to 100 keV can be applied to analyze the near interface residual stress state in the substrate, because the high energy white beam penetrates the coating completely. By the example of an Al₂O₃/TiCN on WC coating system we have studied the feasibility for using the coating reflections being stored in the ED diffraction patterns together with the substrate diffraction lines to analyze the residual stress state in individual sublayers the coating system consists of. The results indicate that the ED method is suitable to detect even steep intralayer stress gradients, if the diffraction conditions are adapted to the coating geometry.