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Scanning electron microscopy

Four scanning electron microscopes are available which are equipped with various analysis options such as energy dispersive X-ray spectroscopy (EDX), electron backscatter diffraction (EBSD), electron beam induced current (EBIC), cathodoluminescence (CL) and atomic force microscope (AFM).

Zeiss Merlin

  • 0,8 nm resolutiona at 15kV 1,4nm at 1kV
  • 20V-30kV accelerating voltage
  • InLens (SE) for Detector for Secondary electron detection on the optical axis
  • InLens (EsB) for energy selective backscattered electron detection for stronger material contrasts
  • SE2 detector
  • AFM : Extends the capabilities of the SEM to the abolition of atomic layers and the study of surface magnetism or local conductivity

Zeiss UltraPlus

  • SE und BSE Detectoren
  • Charge-compensation und Polishing System
  • EBSD/EDX System AZtec von Oxford Instruments
  • EBIC System (point electronic)
  • CL System (EMSystems)

LEO Gemini 1530

  • SE detectors
  • EDX system by Thermo Fisher