• 
  Wünsch, F.; Klein, D.; Podlasly, A.; Ostman, A.; Schmidt, M.; Kunst, M.: Low-temperature contacts through Si_xN_y-antireflection coatings for inverted a-Si:H/c-Si hetero-contact solar cells. Solar Energy Materials and Solar Cells 93 (2009), p. 1024-1028

10.1016/j.solmat.2008.11.040

Abstract:
wafersusedinsolarcellproductionarebecomingthinner.Besides,anelectronicdegradationofthe SixNy/c-Si interfaceoccursatthesetemperaturesespeciallyiftheSixNy layerisdirectlydepositedonto high-qualityabsorbersasonthefrontsideofa-Si:H/c-Sihetero-contactsolarcellsofinvertedgeometry. The latterstructurehasbeenproposedasaneasyproduciblehigh-efficiencysolarcell.Low-temperature alternativessuchaslocalablationofSixNy with 355nmlaserradiationareexaminedwithregardtothe stabilityoftheelectronicqualityofpassivatedareasbetweentheopeningsintheSixNy layer. Contactlesstime-resolvedmicrowaveconductivitymeasurements(TRMC)areappliedtomeasure changes inelectronicpassivationafterthesetreatments.Subsequentgalvanicmetallizationofthe openingsisoptimizedforitsuseasohmiccontacts.